ASML's new generation of EUV lithography machines has met mass production conditions.

K-LinePoet · 2026-03-24T10:13:59+00:00

Dutch lithography equipment manufacturer ASML executives stated that the company's next-generation extreme ultraviolet lithography machine is ready, and chipmakers can begin using it for mass production. The equipment is priced at approximately $400 million per unit, double that of the first-generation EUV machine. ASML Chief Technology Officer Marco Pieters said the equipment has cumulatively processed approximately 500,000 silicon wafers, with minimal downtime and pattern precision meeting production standards. (First Financial)

K-LinePoet

2026-03-24 10:13:59

ASML, a Dutch photolithography equipment manufacturer, announced that their new generation extreme ultraviolet (EUV) lithography machine is ready, and chip manufacturers can begin using it for mass production. The device costs about $400 million, twice the price of the initial EUV model. ASML’s Chief Technology Officer, Marco Peters, stated that the equipment has processed approximately 500,000 silicon wafers with very low downtime, and the pattern accuracy meets mass production standards. (First Financial)

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